KGM

    Specifications

    KGM 181

    KGM 182

    KGM 282

    Measuring standard

    Coefficient of linear expansion

    Two-coordinate TITANID phase grating

    αtherm  8 x 10-6 K-1

    Accuracy grade

    ± 2 µm

    ± 1 µm

    Measuring range

    ∅ 140 mm

    ∅ 230 mm

    Incremental signals

    1 VPP

    Signal period

    4 µm in measuring directions I and II

    Measuring step

    ≥ 0.001 µm (with EIB 74x)

    Voltage supply

    5 V ± 0.25 V/< 100 mA (per axis)

    Mount for scanning head

    ∅ 20h7

    Traversing speed

    ≤ 80 m/min

    ≤ 72 m/min

    Weight (approx.)

    Grid plate

    Scanning head

    4.0 kg

    0.6 kg

    3.1 kg

    0.6 kg

    4.9 kg

    0.6 kg